APG Material has advanced target production technology and mature production process
Grouting and sintering: as the earliest manufacturer of ceramic targets in China, APG Material has advanced grouting and sintering process. Through the ball mill and spray granulation mechanism, the raw material particles are further refined and the molecular structure is more compact, which not only preserves the activity of the oxygen compounds, but also makes the products of ultra high density easier. All imported sintering furnaces are adopted and designed in combination with their own process characteristics. The sintering furnace has stronger thermal stability. The target fired by this furnace body has high relative density and good color consistency. Ultra high temperature sintering makes the target deoxidized fully and has strong conductivity, which is suitable for high sputtering power.
Powder sintering: the raw material powder is mixed and milled and homogenized, then atomized by spray granulation process, and then instantly dried into granular powder under high temperature and hot air flow. The powder material with different sizes and shapes is changed into smooth spherical particles, which makes the molecular structure more compact. Provide high-performance powder for subsequent target production.
Vacuum melting: APG Material has a large vacuum melting furnace with heating blocks and small heat loss; Electromagnetic stirring with certain intensity in the molten pool can promote the homogenization of alloy composition, and the oxygen content of the melted alloy is very low in vacuum environment. It can also melt copper, aluminum, titanium, gold, silver and other materials and their alloys. The control process is standardized to ensure the high purity of single material target and the uniformity of alloy target, and the target is not easy to segregate.
Plasma spraying: APG Material adopts the world's most advanced axial center powder feeding method for plasma spraying. The powder particles are always in the surrounding center of argon. At the same time, there are two circles of inert gas protective airflow hood coaxial with the plasma flame flow in the outer layer of the plasma flame flow, which can effectively isolate the high-temperature powder material from the air and best retain the original characteristics of the material, The density of the coating is greatly improved, the relative density of the product is more than 99%, and the oxygen and nitrogen content is very low. At the same time, the utilization rate of the material is also more than 20% higher than that of traditional equipment.
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